TOPICS May.2003

Micro-Force Sensor with Ultra-Miniature, High Sensitivity

1. Introduction
Hokuriku Electric Industry Co., Ltd has newly developed Micro-Force Sensor Device, featuring ultra small size, yet high sensitivity, by utilizing silicon micro-machining as a core technology.

2. Scope
Generally, conventional force sensors are high cost, large size for high weight measurement, or the one used as on/off switch like pressure sensing sheet. There has been a growing market need for sensor suitable for detecting micro force at high precision.

Responding to this market need, this time we are introducing Micro-Force Sensor, housed in 7.0 x 5.2 x2.9 mm size of ultra-miniature, low profile package, yet featuring high sensitivity and high precision.

The Micro-Force Sensor that we have developed this time utilizes long home-nurtured silicon micro-machining technology as a core technology. Thus, it made possible to precisely detect micro force less than 1N, which can not be detected with conventional piezoelectric device or the method utilizing pressure sensitive sheet, also able to achieve high sensitivity at 20mV/N of output.

Housed in 7.0 x 5.2 x2.9 mm size of ultra-miniature, low profile package, its sensing part is shaped in ball, which makes the sensor to utilized in wide range of applications.

Also, recent mobile terminals such as cellular phone or PDA demand miniaturization and multi-functionality even more progressively due to the mobile data communication represented by FOMA (IMT-2000). This acceleration leads to a growing market need of input device from conventional keyboard or pointing device to smaller, lower-profiled device, which should hold even higher input accuracy Our force sensor is well suited for such needs and expected to serve various fields of applications in the future.

3. Features
  1. Small Size, Low Profile - 7.0 x 5.2 x 2.9 mm
  2. Capable of Micro-Force Detection at High
    Sensitivity, High Precision
    • Detection Weight Range: 0 to 5 N
    • Sensitivity: 20mV/N
    • Linearity: +/- 3%FS Max.
  3. Capable of Reflow soldering with SMD package
    Save real estate for high density application

4. Specifications

  1. Rated Weight Range: 0 to 5 N
  2. Weight Durability: 45 N
  3. Linearity: +/- 3%FS maximum
  4. Sensitivity: 20mV/N
  5. Current Consumption: 1mA maximum
  6. Operating Voltage: 3.3V
  7. Outline Dimensions: 7.0 x 5.2 x 2.9 mm
  8. Operating Life: 1 Million times minimum
5. Applications
  1. Mobile Terminals (PDA)
  2. Game Machines
  3. Various Measurement Equipments
  4. Other various Micro-Force Measurements

6. Sample Price
  • US$10 apiece

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